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Nanochem Gas Purifiers?are designed for Ultra High Purity applications – including?comprehensive solutions for source, point-of-use, bulk, and proximate purification – delivering?up to nine 9’s purity gas.

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Since 1985, MATHESON Nanochem? purifiers have provided unprecedented purification solutions?serving a wide range of industries including semiconductor manufacturing, LED production, energy processes, welding, and many more.

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Nanochem UHP Gas Purification.

Learn more about Nanochem capabilities - get the?Nanochem?Purifier Overview Brochure.

Go to the?Nanochem?Product Data page on this website to learn more about?Nanochem:

  • types of gas purification media
  • choices for purifier hardware configurations

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Gas Purification:
High Performance Purification Media and Specialized Hardware.

image of L-300 nanochem gas purifier

Nanochem? purifiers?combine gas-specific purification media and ultra-high purity hardware in one system to eliminate impurities caused by:

  • Upstream leaks
  • Improper cylinder change-outs
  • Increasing impurity concentration during gas cylinder depletion
  • Gas system component contamination
  • Virtual leaks from component / piping "dead pockets" and soft seats

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Gas Purification:
Long Purifier Lifetime and High Purifier Efficiency.

Nanochem? purifiers offer the highest lifetimes and the best efficiencies for impurity removal. Nanochem?purifiers are available for:

  • Silicon-source gases
  • Nitride gases
  • Etchants
  • Purge gases
  • Dopant gases
  • Volatile metals
  • Carrier gases

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Remove oxygen, water, and other contaminants to UHP levels

Oxygen, moisture and other contaminants are removed to < 100 ppt (parts per trillion) and are limited only by the detection limits of even state-of-the-art analytical instrumentation.

Compact and easy to use, Nanochem? purifiers can be installed within the gas cabinet or at the process tool. Most purifiers require no heating or cooling and are capable of handling a broad range of flows and pressures.

MATHESON has one of the most extensive, in-house evaluation laboratories in the industry to assess the quality of gas system components. The benefit is that components selected for Nanochem? purification products are of the highest quality available.

"Live gas" testing is done to ensure purifiers meet or exceed performance specifications in the specific process gas for which they are marketed.

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Gas Purification Performance Benefits & Applications

Nanochem? purifiers offer a number of benefits, such as reduced equipment downtime and protection against fluctuations in gas supply quality and upstream system upsets. Typical performance benefits for the semiconductor / compound semiconductor industry are:

  • Increased carrier concentration, increased mobility
  • Faster crystal growth rates
  • Improved uniformity of surface morphology
  • Fewer defects in epi layers and substrates
  • Longer equipment life & reduced component corrosion

Semiconductor applications include manufacture of ICs and high brightness LEDs. Welding applications include piping for semiconductor fabs, manufacture of aerospace components, and manufacture of process equipment for chemical and biotech industries.

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Looking for a technical paper or pdf not found on this page? Visit our Nanochem Technical Library.

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Purification

nanochem product data

industries served by nanochem gas purifiers

Nanochem Configuration Button

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purifier payment plan

request purifier quotation

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Gases We Purify?(partial listing)?

Items are listed alphabetically by chemical formula. For the same list, sorted by chemical name, visit this page.

If the gas material of interest to you does not appear in this list, please contact us.

?Air Air
?Ar Argon
?Ar (weld) Argon (welding)
?AsH3 Arsine
?AsH3 Arsine (1-10%)
?BCl3 Boron Trichloride
?BF3 Boron Trifluoride
?C2F6 Hexafluoroethane
?C2H2 Acetylene
?C2H4 Ethylene
?C2H6 Ethane
?C3F6 Hexafluoropropylene
?C3F8 Octafluoropropane
?C3H6 Propylene
?C3H8 Propane
?C4F10 Perfluorobutane
?C4F6 Hexafluorobutadiene
?C4F8 Octafluorocyclobutane
?C4H10 Butane
?C4H10 Isobutane
?C4H8 Butene
?C5F8 Octafluorocyclopentene
?CCl2O Phosgene
?CCl4 Carbon Tetrachloride
?CDA Clean Dry Air
?CF4 Carbon Tetrafluoride
?CH2F2 Difluoromethane
?CH3Cl Methylchloride
?CH3SH MethylMercaptan
?CH3SiH3 Monomethyl Silane
?CH4 Methane
?CHF3 Methyl Fluoride
?CHF3 Trifluoromethane
?Chlorocarbons Chlorocarbons
?Cl2 Chlorine
?CO Carbon Monoxide
?CO2 Carbon Dioxide
?COS Carbonyl Sulfide
?CS2 Carbon Disulfide
?Cyclo-hydrocarbons Cyclo-hydrocarbons
?D2 Deuterium
?Fluorocarbons Fluorocarbons
?GeCl4 Germanium Tetrachloride
?GeF4 Germanium Tetrafluoride
?GeH4 Germane
?GeH4 Germane (1-10%)
?H2 Hydrogen
?H2S Hydrogen Sulfide
?H2Se Hydrogen Selenide
?Halocarbons Halocarbons
?HBr Hydrogen Bromide
?HCl Hydrogen Chloride
?He Helium
?HF Hydrogen Fluoride
?Hydrocarbons Hydrocarbons
?Kr Krypton
?N2 Nitrogen
?N2O Nitrous Oxide
?Ne Neon
?NH3 Ammonia
?NO Nitric Oxide
?NO2 Nitrogen Dioxide
?O2 Oxygen
?O3 Ozone
?PH3 Phosphine
?PH3 Phosphine (1-10%)
?SF6 Sulfur Hexafluoride
?Si2H6 Disilane
?SiCl4 Silicon Tetrachloride
?SiClH3 Monochlorosilane
?SiCl2H2 Dichlorosilane
?SiCl3H2 Trichlorosilane
?SiF4 Silicon Tetrafluoride
?SiH3CH3 Methyl Silane
?SiH4 Silane
?SO2 Sulfur Dioxide
?Xe Xenon